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Outer Diameter Φ300~Φ475 mm
Inner Diameter Customer Spec
Orientation (100), (111)
Type/Dopant P/Boron
Resistivity Low Res(e.g.<0.015,<0.02 …);Normal(e.g.1-4); High Res(e.g.60~90);Customer Spec
Thickness Customer Spec ± 0.05 mm
Others Customer Spec
产品参数
Outer Diameter
Φ300~Φ475 mm
Inner Diameter
Customer Spec
Orientation
(100), (111)
Type/Dopant
P/Boron
Resistivity
Low Res(e.g.<0.015,<0.02 …);Normal(e.g.1-4); High Res(e.g.60~90);Customer Spec
Thickness
Customer Spec ± 0.05 mm
Others
Customer Spec
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